Saturday 18 April 2015

CU7002 MEMS and NEMS Notes

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CU7002 MEMS and NEMS Notes and Reference books :


Anna University ME VLSI Design Regulation 2013 Second semester Elective III CU7002 MEMS and NEMS notes and e-books are available students can download the notes.Here we have provided the notes for CU7002 MEMS and NEMS question paper. Anna University ME VLSI Design CU7002 MEMS and NEMS Syllabus, Ppt, reference books, important questions are well framed on our web page that is annaunivhub.


Anna University CU7002 MEMS and NEMS Important questions is provided below by annaunivhub. CU7002 Question bank for all 5 units notes are uploaded. Here CU7002 University question paper download link is provided and students can also download the CU7002 Syllabus and can make use of it.

CO7002 MEMS and NEMS Syllabus - Download

CO7002 MEMS and NEMS Notes - Download

CU7002 MEMS and NEMS Reference Book Download:


1. Marc Madou, “Fundamentals of Microfabrication”, CRC press 1997. Download

2. Stephen D. Senturia,” Micro system Design”, Kluwer Academic Publishers,2001 Download

3. Tai Ran Hsu ,”MEMS and Microsystems Design and Manufacture” ,Tata Mcraw Hill, 2002. Download

4. Chang Liu, “Foundations of MEMS”, Pearson education India limited, 2006, Download

5. Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures” CRC Press,
2002 Download



If you have any queries regarding the notes posted you can contact us  and you can also share your notes with us through mail at annaunivhub@gmail.com we will update the notes in our website specifying your name and  college name in our webpage that's is www.annaunivhub.blogspot.in

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